3/4" Male Thread Sintered SS316L Powder Filter Cartridge For CMP Slurry Circulation Filtration

TOPTITECH's 3/4" male thread sintered SS316L powder filter cartridge is engineered specifically for CMP slurry circulation filtration in semiconductor wafer planarization processes. Cold isostatic pressing and high-temperature vacuum sintering transform gas-atomized 316L stainless steel powder into a rigid monolithic porous structure with controlled pore size distribution. The 3/4" male thread connection enables direct drop-in replacement into existing CMP slurry delivery systems, including recirculation loops and point-of-use assemblies at the polishing pad manifold. Depth filtration mechanism traps large particle contaminants-silica agglomerates, ceria debris, and oversized abrasives-within the interconnected pore network while maintaining slurry abrasive integrity. The filtration ratings from 0.2 µm to 65 µm accommodate both silica-based oxide slurries and ceria-based STI slurries.

CMP slurry degradation compounds-such as abrasive aggregates, gel particles from surfactant breakdown, metallic residues from piping corrosion, and bacterial byproducts from recirculation storage-consistently settle into filter cake on the cartridge surface. The all-metal construction eliminates media migration risks common in polymer or fiber-based cartridges, preventing downstream wafer defects including microscratches, haze, and pattern damage from foreign particle contamination. 3/4" male thread sintered SS316L powder filter cartridge withstands repeated alkaline cleaning cycles (pH 10–12) and ultrasonic regeneration without structural degradation. Reusable across multiple production campaigns, this cartridge delivers 5-10 year service life compared to 2-4 week replacement cycles of disposable polymeric alternatives, significantly reducing semiconductor fab consumable costs and downtime.

• Material: SS316L powder
• Size: φ40*400mm
• Pore size: 0.5um
• Connector: 3/4: male thread
• Porosity: 30%-40%
• Technique: Sintering

I. The Particulate Retention Without By-Pass Risks

Gas-atomized 316L spherical powder compacts and sinters into a monolithic depth filtration matrix, delivering an absolute rated removal down to 0.2 μm to 60 μm. The sintered structure eliminates internal bypass channels and medium migration found in wound or laminated designs. Depth filtration captures abrasive agglomerates-silica, ceria, alumina aggregates-throughout the porous network, not merely on the surface. Non‑shedding characteristics prevent contamination of upstream slurry recirculation loops and pad dispensing assemblies. Precise pore size distribution from cold isostatic pressing and hydrogen‑atmosphere sintering ensures consistent filtration efficiency across multiple production lots.

 

 

II. High Dirt‑Holding Capacity and Extended Service Life

 

The 3/4" male thread cartridge offers large dirt‑holding capacity, capturing slurry degradation compounds-gel particles from surfactant breakdown, metallic residues from piping corrosion, bacterial byproducts from recirculation storage-with low initial pressure drop. High porosity (30–40%) and uniform pore structure maintain high permeability and low filtration resistance under continuous CMP slurry circulation. Extended service life reduces filter change frequency, critical for high‑throughput wafer fabs.

III. Superior Chemical and Thermal Stability

SS316L sintered construction withstands extreme pH environments (pH 10–12) found in silica and ceria‑based slurry formulations. Molybdenum content provides pitting resistance and chloride stress corrosion cracking protection compared to 304L grades. Full‑metal monolithic structure resists damage from high pressure, alternating load cycles, and temperature fluctuations during recirculation pump operation.

 

IV. Cleanable, Regenerable, and Low Total Cost of Ownership

 

All‑metal construction supports multiple cleaning methods: back‑flush, ultrasonic bath, or high‑temperature oxidation burn‑off. Alkaline cleaning cycles (pH 10–12) and ultrasonic regeneration restore original permeability without structural degradation. The cartridge delivers a 5‑to‑10× longer service life compared to disposable polymer (PTFE/PVDF) or fiber‑based filters, drastically reducing consumable costs and tool downtime.

V. Direct Drop‑In Retrofit with 3/4" Male Thread

3/4" male NPT thread connection integrates seamlessly into existing CMP slurry delivery systems-recirculation loops, point‑of‑use assemblies at polishing pad manifolds-without additional adapters. Compatible with standard filter housings, enabling field replacement within minutes. Laser‑welded end caps and welded interfaces ensure no leakage under high‑flow, high‑vibration wafer fabrication environments. Customizable end fittings, thread types, and overall dimensions available per customer requirements.

 

VI. Performs in High‑Temperature Gas and Liquid Applications

 

Extends beyond slurry filtration to gas distribution lines, steam filtration, and high‑purity chemical transfer. Suitable for high‑temperature gas filtration up to 600°C, with thermal stability in autoclave sterilization cycles where polymer membranes degrade. Provides additional functions: noise reduction for pneumatic exhaust, gas buffering in CMP tool pneumatic controls, and flame retardation for hazardous gas lines.

1. CMP Slurry Circulation Filtration in Semiconductor Wafer Planarization

The 3/4" male thread sintered SS316L powder filter cartridge removes oversized abrasive agglomerates (silica, ceria, colloidal silica) from chemical mechanical planarization slurry while preserving effective polishing particles between 10–200 nm. Depth filtration matrix traps particle contaminants-silica debris from pad conditioning, gel particles from surfactant breakdown, metallic residues from piping corrosion-within the interconnected pore network without by‑pass channels. Absolute retention eliminates microscratches, haze, and pattern damage on wafer surfaces, directly improving die yield in advanced logic and memory fabrication. Fits directly into point-of-use assemblies and recirculation loops of CMP tools, with 3/4" male NPT threading enabling quick field replacement without housing modifications.

2. Catalyst Recovery in Refinery and Petrochemical Processes

The 3/4" male thread sintered SS316L powder filter cartridge operates under high differential pressure (＞30 bar) in liquid‑solid and gas‑solid separation duties across hydrocrackers, hydrotreaters, and FCC units. Captures precious metal catalysts (platinum, palladium, Raney nickel) and zeolite‑based cracking catalysts from reactor effluent streams, recovering catalyst fines down to 0.5 μm. High open porosity (30–50%) and rigid sintered network resist erosion from high‑velocity catalyst slurry flows, enabling extended on‑stream cycles between backwash regenerations.

3. High-Temperature Gas and Steam Purification

The 3/4" male thread sintered SS316L powder filter cartridge withstands continuous operation up to 600°C in oxidizing atmospheres, making it suitable for flue gas desulfurization pre‑filtration, continuous emission monitoring system (CEMS) probe protection, and high‑temperature dust removal from gasifier syngas. Performs dry steam filtration at 200–300°C, removing rust particles, pipe scale, and carbon deposits that damage sterile steam sterilization filters downstream. Also applicable for compressed air oil removal, demisting in gas-liquid coalescers, and sterile vent filtration for fermenters and bioreactors.

4. Corrosive Chemical and Solvent Processing

316L molybdenum content provides pitting resistance in chloride‑containing media (seawater, bleach, hydrochloric acid service) where 304 stainless steel fails. The 3/4" male thread sintered SS316L powder filter cartridge filters strong polar solvents (DMF, NMP, acetone), concentrated sulfuric acid, caustic soda solutions, and organic acids without material degradation. Depth filtration captures catalyst fines from hydrogenation reactors, removes polymerization residues from monomer recirculation loops, and clarifies heat transfer fluids in refinery systems. Broad chemical compatibility suits both continuous process filtration and batch operations with frequent solvent changeovers.

5. Hydrogen Energy and Electrolyzer Systems

Micro‑porous sintered 316L structure serves as hydrogen diffuser layer in PEM electrolyzers and alkaline water electrolysis systems. The 3/4" male thread sintered SS316L powder filter cartridge captures ionic impurities and particulate contaminants from recirculating electrolyte streams, protecting membrane electrode assemblies from degradation. Also deployed as gas-liquid separation element at electrolyzer outlets, removing moisture carryover from hydrogen product gas before compression and storage.

6. Industrial Water and Wastewater Treatment

The 3/4" male thread sintered SS316L powder filter cartridge polishes reverse osmosis permeate in semiconductor ultrapure water systems, removing trace particles down to 0.22 μm to meet SEMI standards for wafer rinsing. Deployed in produced water filtration for oilfield injection, removing suspended solids from fracturing flowback and cooling tower blowdown. Also applicable as final polishing filter in CIP return lines, capturing weld spatter, gasket debris, and corrosion products from stainless steel piping networks.

Tel: 0917-3873009

Phone: +86 18992731201

Email: zhangjixia@bjygti.com

Fax: 0917-3873009

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WhatsApp: +86 18992731201

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